Author/Authors :
Dalla Betta، نويسنده , , G.-F and Boscardin، نويسنده , , M and Bosisio، نويسنده , , L and Rachevskaia، نويسنده , , I and Zen، نويسنده , , M and Zorzi، نويسنده , , N، نويسنده ,
Abstract :
We report on the development of a fabrication technology for double-sided, AC-coupled silicon microstrip detectors for tracking applications. Two batches of detectors with good electrical figures and a low defect rate were successfully manufactured at IRST Laboratory. The processing techniques and the experimental results obtained from these detector prototypes are presented and discussed.