Title of article
Development of a fabrication technology for double-sided AC-coupled silicon microstrip detectors
Author/Authors
Dalla Betta، نويسنده , , G.-F and Boscardin، نويسنده , , M and Bosisio، نويسنده , , L and Rachevskaia، نويسنده , , I and Zen، نويسنده , , M and Zorzi، نويسنده , , N، نويسنده ,
Pages
10
From page
306
To page
315
Abstract
We report on the development of a fabrication technology for double-sided, AC-coupled silicon microstrip detectors for tracking applications. Two batches of detectors with good electrical figures and a low defect rate were successfully manufactured at IRST Laboratory. The processing techniques and the experimental results obtained from these detector prototypes are presented and discussed.
Keywords
Fabrication technology , Silicon microstrip detectors , Electrical characterization
Journal title
Astroparticle Physics
Record number
2014098
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