Title of article
Fabrication of ATLAS pixel detector prototypes at IRST
Author/Authors
Boscardin، نويسنده , , M. Francesca Betta، نويسنده , , G.-F.Dalla and Gregori، نويسنده , , P. and Zen، نويسنده , , M. and Zorzi، نويسنده , , N.، نويسنده ,
Pages
5
From page
83
To page
87
Abstract
We report on the development of a fabrication technology for n-on-n silicon pixel detectors oriented to the ATLAS experiment at LHC. The main processing issues and some selected results from the electrical characterization of detector prototypes and related test structures are presented and discussed.
Keywords
Silicon pixel detectors , Fabrication technology , Electrical characterization
Journal title
Astroparticle Physics
Record number
2015939
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