Title of article
Design, manufacturing and testing of gratings for synchrotron radiation
Author/Authors
Nelles، نويسنده , , B and Heidemann، نويسنده , , K.F and Kleemann، نويسنده , , B، نويسنده ,
Pages
7
From page
260
To page
266
Abstract
The grating is one of the most important components of a monochromator. Figure accuracy and microroughness of the substrate, accuracy of the groove pattern, shape and uniformity of the groove profiles, and the reflection coating are to be brought to the technological limits, if optimum performance is requested. Precise testing is as important as accurate manufacturing. Some new aspects for these topics are presented.
Keywords
Grating manufacturing , VLD-gratings , Blazed gratings
Journal title
Astroparticle Physics
Record number
2016286
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