Title of article :
Design, manufacturing and testing of gratings for synchrotron radiation
Author/Authors :
Nelles، نويسنده , , B and Heidemann، نويسنده , , K.F and Kleemann، نويسنده , , B، نويسنده ,
Abstract :
The grating is one of the most important components of a monochromator. Figure accuracy and microroughness of the substrate, accuracy of the groove pattern, shape and uniformity of the groove profiles, and the reflection coating are to be brought to the technological limits, if optimum performance is requested. Precise testing is as important as accurate manufacturing. Some new aspects for these topics are presented.
Keywords :
Grating manufacturing , VLD-gratings , Blazed gratings
Journal title :
Astroparticle Physics
