Author/Authors :
Kinoshita، نويسنده , , Toyohiko and Fukui، نويسنده , , K. and Asaka، نويسنده , , S. and Yoshida، نويسنده , , H. and Watanabe، نويسنده , , M. and Horigome، نويسنده , , T. and Peijun، نويسنده , , Ma and Ohtsuka، نويسنده , , K. and Iwanaga، نويسنده , , M. and Ohshima، نويسنده , , E.، نويسنده ,
Abstract :
A surface profiler for optical elements used in synchrotron radiation beamlines has been developed. By measuring the precise positions of an incident and reflected laser beam, the surface profile of mirrors and gratings can be obtained. The profile of large mirrors up to 700 mm long and that of any other shape device such as plane and non-spherical mirrors can be also measured. The design concept and preliminary examples of profile measurements are reported.
