Title of article
Soft X-ray reflectivity and structure evaluation of Ni/C/Ti/C multilayer X-ray mirrors for water-window region
Author/Authors
Takenaka، نويسنده , , H. and Ito، نويسنده , , H. and Nagai، نويسنده , , K. and Muramatsu، نويسنده , , Y. and Gullikson، نويسنده , , E. and Perera، نويسنده , , R.C.C.، نويسنده ,
Pages
4
From page
341
To page
344
Abstract
A Ni/Ti-based multilayer with thin interleaved carbon layers (Ni/C/Ti/C multilayer) has been designed and fabricated for the reflection coating of a grazing-incident-angle reflector in the water-window region for use in X-ray photoemission spectroscopy. It was found to be a highly reflective mirror at wavelengths just above the Ti absorption edge (around 2.73 nm), as designed. A Ni/C/Ti/C multilayer with 0.2-nm-thick interleaved carbon layers was fabricated by magnetron sputtering. The measured reflectivity was 40% at a wavelength of 2.76 nm and an incident angle of 9.5°. This value is a little bit higher than that for a Ni/Ti multilayer with almost the same layer structure. Furthermore, the addition of thin carbon layers was found to significantly improve the heat resistance of a multilayer.
Keywords
Water window , Multilayer mirror , heat resistance , Reflectivity , Ni/Ti , Ni/C/Ti/C
Journal title
Astroparticle Physics
Record number
2016325
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