Author/Authors :
Kim، نويسنده , , K.R. and Kim، نويسنده , , Hy-Sook Kim، نويسنده , , C.G. and Han، نويسنده , , H.S. and Bak، نويسنده , , J.S.، نويسنده ,
Abstract :
An UHV compatible collimating mirror system has been built for the precise manipulation of the mirrors of beamline 6B at Pohang Light Source. A mechanism based on stepper motor driven manipulators has been developed which provides x, y linear and roll, pitch and yaw rotational adjustment. The test results under atmosphere indicated that the translational movements showed good linear characteristics, yielding an accuracy of 0.5–1.25 μm; a rotational accuracy of 1.2–3.8 μrad was deduced.
Keywords :
Collimating mirror , UHV vacuum chamber , manipulator , Bender