Scanning soft X-ray spectromicroscopy at the Pohang Light Source: commissioning results

A scanning spectromicroscopy facility has been installed at the undulator radiation beamline at the Pohang Light Source. The spectromicroscopy is operational in both the scanning transmission X-ray microscopy (STXM) and the scanning photoelectron microscopy (SPEM) modes. Currently, the measured X-ray spot size on the sample is about 0.4 μm. The effective photon energy range of the STXM is 250–1000 eV and that of the SPEM is 400–1000 eV. The performance of the facility is presented in this report.