Title of article
Ultra-deep LIGA process and its applications
Author/Authors
Cheng، نويسنده , , Y. and Shew، نويسنده , , B.-Y. and Chyu، نويسنده , , M.K. and Chen، نويسنده , , P.H.، نويسنده ,
Pages
6
From page
1192
To page
1197
Abstract
Deep X-ray lithography developed in Germany around the 1980s is an important micromachining technology. Combined with electroplating and molding, this technology can produce micromachining parts with low cost and flexible choices of material. The ultra-deep (UD) LIGA process developed at the Synchrotron Radiation Research Center (SRRC) that provides better development of photoresist is capable of producing microstructures of millimeters in size. The ongoing micromachining projects at SRRC benefited from this UD LIGA process include: microfiber spinneret, leadframe punch, and w-band klystrino.
Keywords
Thick-film lithography , Ultra-deep X-ray lithography , Ultra-deep LIGA process , Micromachining , Synchrotron radiation
Journal title
Astroparticle Physics
Record number
2016817
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