Title of article
Effect of SR irradiation on In2O3 film
Author/Authors
Hanamoto، نويسنده , , K. and Hirai، نويسنده , , A. and Sasaki، نويسنده , , M. and Kimura، نويسنده , , Y. and Miyatani، نويسنده , , Asok K. and Kaito، نويسنده , , Itsuki C. and Nakayama، نويسنده , , Y.، نويسنده ,
Pages
4
From page
1213
To page
1216
Abstract
The effect of SR irradiation on the crystal growth of indium oxide films prepared by electron-beam evaporation have been studied by X-ray diffraction and high-resolution electron microscopy. An as-deposited film showed In2O3 crystallites with a size of 2–10 nm. The crystallites were destroyed by SR irradiation under oxygen flow. SR irradiation without oxygen flow showed the growth of In2O3 crystallites up to 20 nm in size with accompanying deoxidation and indium-particle growth. The as-deposited film was composed of variously oriented particles. Periodic oxygen decomposition of the film preferentially took place on the (0 0 1)-oriented particle.
Keywords
High-resolution electron microscopy , Thin film , Irradiation , In2O3 , crystallization
Journal title
Astroparticle Physics
Record number
2016830
Link To Document