The use of quasi-Bragg diffuse scattering for express measurement of changes in multilayer d-spacing

The possibility of the use of quasi-Bragg diffuse scattering for express measurements of changes in multilayer d-spacing was studied. The error of this method was shown to be minimal, if the incident or scattered angles are sufficiently far from the critical total external reflection or Bragg angles. As an example, the measurements of the W/Si multilayer mirror with linearly varying d-spacing are presented.