Anomalous scattering of ultrasoft X-rays: a new technique to study the structure of surface solid layers

This paper presents the results of experimental investigations of the anomalous scattering of X-rays in the ultra-soft X-ray region. The example of a study of a number of solid state objects shows the dependence of the parameters of anomalous scattering of X-ray on such structural factors as crystal anisotropy, variety of density of surface solid layers, and presence of structural one- and two-dimensional defects and interface boundaries in these layers.