Author/Authors :
Maier-Komor، نويسنده , , P and Friese، نويسنده , , J and Gernhنuser، نويسنده , , R and Homolka، نويسنده , , J and Kastenmüller، نويسنده , , A and Kِrner، نويسنده , , H.J and Ulrich، نويسنده , , A and Zeitelhack، نويسنده , , K، نويسنده ,
Abstract :
The setup in the UHV box coater for the HADES RICH mirrors was modified to deposit VUV reflective layers on large area substrates. These substrates were made of 2 mm thick float glass with 87 cm spherical curvature and a perimeter of 86 cm. A good uniformity of the coatings could be obtained by a larger source-to-substrate distance of 155 cm. Impurity problems due to lower deposition rates had to be avoided with a better process vacuum. The modified setup, the thickness calibrations, uniformity tests, process conditions and reflectivity measurements are presented.
Keywords :
RICH detector , Titanium , Thickness by quartz crystal monitor , aluminum , Electron beam evaporation , Optical Measurements , Resistance heated source , VUV reflectivity