Tunable and bright EUV sources using the interaction of medium–energy electron beams with periodic multilayer targets

We give the design of tunable and bright EUV sources based on the interaction of medium-energy electrons with periodic multilayer targets. The basic phenomon is the Bragg resonant transition radiation occurring when transition radiation is diffracted under the Bragg conditions within a periodic multilayer structure. To achieve the tunability, we propose to use laterally d-graded multilayer, and to obtain bright sources, we propose to associate multilayer targets deposited on thin semitransparent membranes. The typical performances of such sources are calculated by using a recently developed model.