Irradiation qualification of CMS silicon tracker components with protons

The tracking system of the CMS experiment at the LHC collider (CERN) is based on silicon micro-strip detectors. They will be exposed to an equivalent fluence of up to 1.6×1014n (1 MeV)/cm2 during 10 years of operation. The survival of the sensors in such a radiation environment depends strongly on the sensor design and on the choice of appropriate material. During production we have to verify not only the current quality of the delivered sensors (optical and electronic inspection) but also their radiation hardness. After irradiation to the exposed fluence plus a safety factor, the quality of bulk and surface parameters is verified. Required protocol, measurements and results are presented.