Author/Authors :
Yasuda، نويسنده , , Hirotsugu، نويسنده ,
Abstract :
While gas discharges under atmospheric pressure occur as filamentary discharges, most studies on plasma polymerization, or plasma Chemical Vapor Deposition, were carried out in low-pressure (low-temperature, non-equilibrium) plasma. However, it is reasonable to assume that the fundamentals of plasma polymerization found by low-pressure discharge apply to the gas phase in the filamentary discharge. Plasma polymerization as a potential cause of aging effects is reviewed with respect to (1) polymerization in DC discharge, (2) competitive ablation and polymerization principle, and (3) from the viewpoint of detector wire aging.