Author/Authors :
Yashchuk، نويسنده , , Valeriy V. and Barber، نويسنده , , Samuel and Domning، نويسنده , , Edward E. and Kirschman، نويسنده , , Jonathan L. and Morrison، نويسنده , , Gregory Y. and Smith، نويسنده , , Brian V. and Siewert، نويسنده , , Frank and Zeschke، نويسنده , , Thomas and Geckeler، نويسنده , , Ralf and Just، نويسنده , , Andreas، نويسنده ,
Abstract :
A new low-budget slope measuring instrument, the Developmental Long Trace Profiler (DLTP), was recently brought to operation at the ALS Optical Metrology Laboratory. The design, instrumental control and data acquisition system, initial alignment and calibration procedures, as well as the developed experimental precautions and procedures are also described in detail. The capability of the DLTP to achieve sub-microradian surface slope metrology is verified via cross-comparison measurements with other high-performance slope measuring instruments when measuring the same high-quality test optics. The directions of future work to develop a surface slope measuring profiler with nano-radian performance are also discussed.
Keywords :
X-ray optics , Surface Metrology , Surface slope measurement , Long trace profiler , Autocollimator , Surface profilometer , Pentaprism
