Author/Authors :
Kimura، نويسنده , , Takashi and Ohashi، نويسنده , , Haruhiko and Mimura، نويسنده , , Hidekazu and Yamakawa، نويسنده , , Daisuke and Yumoto، نويسنده , , Hirokatsu and Matsuyama، نويسنده , , Satoshi and Tsumura، نويسنده , , Takashi and Okada، نويسنده , , Hiromi and Masunaga، نويسنده , , Tatsuhiko and Senba، نويسنده , , Yasunori and Goto، نويسنده , , Shunji and Ishikawa، نويسنده , , Tetsuya and Yama، نويسنده ,
Abstract :
In the third- and coming fourth-generation synchrotron radiation facilities, X-rays having both high brightness and high coherency can be utilized. Such X-rays require high accuracy in the reflective optics. In this study, we developed an ultra-precise measurement instrumentation for tangentially long X-ray mirrors using a Fizeau interferometer. In the system, the mirror figure is measured by stitching the subaperture profiles measured by the relative-angle determinable stitching interferometry, which we developed previously. High measurement accuracy of approximately 2 nm (peak to valley) was achieved in the measurement of a 400 mm-long aspherical surface.
Keywords :
X-ray focusing , X-Ray mirror , Interferometric measurement , MSI , RADSI
