An off-axis multi-channel analyzer for secondary electrons

The design, simulation and test of a new dispersive multi-channel analyzer are presented. Owing to the experimental voltage resolution of 50 mV and a spectrometer constant of 5.6×10−8 VA1/2s1/2 this analyzer is very well suited for voltage measurements in integrated circuits. The analyzer can also be used advantageously for a complete separation of secondary and backscattered electrons in the imaging mode. The parallel detection of a 20 eV band width of the secondary electron spectrum may be used in the future to attain characteristic material information at low primary electron energies <2 keV.