Author/Authors :
Arakawa، نويسنده , , T. and Kudo، نويسنده , , H. and Sato، نويسنده , , H. and Kobayashi، نويسنده , , H. and Izumi، نويسنده , , T. and Ohtsuka، نويسنده , , S. and Mori، نويسنده , , K. and Shoji، نويسنده , , S. and Osaka، نويسنده , , T. and Homma، نويسنده , , T. and Mitsuda، نويسنده , , K. and Yamasaki، نويسنده , , N. and Fujimoto، نويسنده , , R. and Iyomoto، نويسنده , , N. and Oshima، نويسنده , , T. and Futamoto، نويسنده , , K. and Takei، نويسنده , , Y. an، نويسنده ,
Abstract :
We have developed multi-pixel TES microcalorimeters in order to realize high-energy resolution and X-ray imaging. A Sn absorber and a Bi absorber were formed on Si3N4 and SiO2 membrane using two-step exposure photolithography and electrodeposition. A FEM analysis was carried out to investigate the performance of the X-ray microabsorbers. In addition, a superconducting through-wafer interconnection was demonstrated considering the future X-ray imager using microcalorimeters. Detail of the fabrication techniques, characteristics and simulation results of two types of the microabsorbers, as well as those of the calorimeters are described.
Keywords :
Sn absorber , Bi absorber , Calorimeter , FEM analysis
