Author/Authors :
Miller، نويسنده , , N.A and Ullom، نويسنده , , J.N and Beall، نويسنده , , J.A and Hilton، نويسنده , , G.C and Deiker، نويسنده , , S and Doriese، نويسنده , , W.B and Irwin، نويسنده , , K.D. and Reintsema، نويسنده , , C.D. and Vale، نويسنده , , L.R. and Xu، نويسنده , , Y، نويسنده ,
Abstract :
One challenge to using cryogenic detectors for X-ray spectroscopy on a scanning electron microscope is the implementation of infrared blocking filters. In order to achieve high X-ray transmission, these filters can be as thin as 250 nm and consequently are extremely fragile. To avoid breaking the filters, the cryostat must be evacuated slowly and by a trained operator. In this presentation, we describe the filter system currently used at NIST. In addition, we describe recent efforts to build a more robust and easy-to-use filter system. We present initial efforts to strengthen conventional aluminum–parylene filters with micromachined silicon grids that only reduce X-ray transmission by 2%. We also describe an automated pump-out system based on a commercial mass-flow controller.
