Author/Authors :
Szeflinski، نويسنده , , V. and Aliane، نويسنده , , A. and De Moro، نويسنده , , F. and Pigot، نويسنده , , C. and Sauvageot، نويسنده , , J-L. and Agnèse، نويسنده , , P. and Gasse، نويسنده , , A. and Ribot، نويسنده , , H. and Gremion، نويسنده , , E. and De La Broise، نويسنده , , X. and Navick، نويسنده , , X.F.، نويسنده ,
Abstract :
We are developing an X-ray spectro-imaging detector at cryogenic temperature (<100 mK) for next space generation missions, using silicon technology. Each pixel of this array detector is made of a tantalum absorber bonded by indium bump hybridization, to an implanted and high-temperature diffused silicon thermistor. The thermo-mechanical link, provided by the indium bump hybridization, is being improved in terms of thermal capacitance. We present the state of development and experimental results on this new generation of X-ray microcalorimeters.
Keywords :
X-ray detector , Microcalorimeter , Bolometer , Silicon technology , Ion-implantation
