Development of new X-ray imaging device sensitive to 0.1–100 keV

We report on a new photon-counting detector possessing unprecedented spatial resolution, moderate spectral resolution and high background-rejection capability for 0.1–100 keV X-rays. It consists of a X-ray charge-coupled device (CCD) and a scintillator. The scintillator is directly deposited on the backside of the X-ray CCD. Low-energy X-rays below 10 keV can be directly detected in the CCD. The majority of hard X-rays above 10 keV passes through the CCD but can be detected in the scintillator, generating visible lights there. Since CCDs have moderate detection efficiency for visible lights, they can again be absorbed by the same CCD. We developed a method of direct deposition of CsI(Tl) forming a needle-like structure on the CCD and fabricate the CsI(Tl)-deposited CCD. We demonstrate the high spatial resolution of 30 μm for 30 keV X-rays.