Author/Authors :
Fan، نويسنده , , Qiwen and Xu، نويسنده , , Guoji and Du، نويسنده , , Yinghui and Zhang، نويسنده , , Rong، نويسنده ,
Abstract :
Preparation techniques are described for self-supporting targets with thickness of less than 100 μg/cm2 by means of vacuum evaporation and focused heavy-ion beam sputtering. With a visible light photo spectrometer optical transmittance as a function of thickness was calibrated for several metal films of different elements. These data were used for thickness determination of self-supporting targets of those materials.
Keywords :
Focused heavy-ion beam sputtering , Vacuum deposition , Self-supporting , Thickness by optical transmittance
