Author/Authors :
Sugai، نويسنده , , I. and Oyaizu، نويسنده , , M. and Takeda، نويسنده , , Y. and Kawakami، نويسنده , , H. and Hattori، نويسنده , , H. and Kawasaki، نويسنده , , K.، نويسنده ,
Abstract :
Mixed noble gas (Kr+Ne) was used for ion beam sputtering (MIBS) with the aim to produce stripper foils with long lifetime.
r characteristics of the MIBS method were investigated. Angular thickness distributions were measured for the deposits of three crystalline structures of carbon sputter targets: synthetic diamond, glassy carbon and polycrystalline graphite. In this setup the vertical ion beam hits the horizontal surface of the respective carbon target. Differences are presented for three ion energies. In a second setup the angle of the sputter target relative to the vertical ion beam could be adjusted for preparing carbon deposits with lifetime dependences on the inclination angle α on a glassy carbon surface. Resulting stripper foils were tested for their lifetime depending on sputter material and sputtering angle θ in case of graphite. The lifetime measurements were performed with a 3.2 MeV Ne+ ion beam as usual.
Keywords :
Carbon stripper , Stripper lifetime , sputtering , Heavy ion accelerator