Author/Authors :
Naito، نويسنده , , Takashi and Tadano، نويسنده , , Mikito and Terunuma، نويسنده , , Nobuhiro and Urakawa، نويسنده , , Junji and Nakamura، نويسنده , , Eiken and Hasumoto، نويسنده , , Masami and Sakai، نويسنده , , Hiroshi and Shibuya، نويسنده , , Takashi and Sakai، نويسنده , , Fumiko and Ohgaki، نويسنده , , Hideaki and Sei، نويسنده , , Norihiro، نويسنده ,
Abstract :
An investigation of carbon contamination on synchrotron radiation-irradiated devices was carried out under several conditions. The measurement results showed a strong dependence of the existing oil molecules on the device. In contrast, CO2 and CH4 gases did not contribute to the contamination. The process of contamination showed many similarities, which was observed during specimen contamination of electron microscopy. The effectiveness of long-time evacuation before SR exposure was confirmed.
