Title of article
Application of X-ray scattering technique to the study of supersmooth surfaces
Author/Authors
Asadchikov، نويسنده , , V.E. and Kozhevnikov، نويسنده , , I.V. and Krivonosov، نويسنده , , Yu.S. and Mercier، نويسنده , , R. and Metzger، نويسنده , , T.H. and Morawe، نويسنده , , C. and Ziegler، نويسنده , , E.، نويسنده ,
Pages
21
From page
575
To page
595
Abstract
Applications of the X-ray scattering technique for studying supersmooth surfaces with rms roughness of 0.1–0.2 nm are discussed. The experimental schemes are analyzed and systematic errors on the determination of 2D and 1D PSD-functions are evaluated. Results of laboratory and synchrotron experiments are presented on the study of roughness of superpolished substrates made of different materials as well as for B4C films of different thickness.
Keywords
Surface roughness , X-Ray scattering
Journal title
Astroparticle Physics
Record number
2024353
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