Author/Authors :
Asadchikov، نويسنده , , V.E. and Kozhevnikov، نويسنده , , I.V. and Krivonosov، نويسنده , , Yu.S. and Mercier، نويسنده , , R. and Metzger، نويسنده , , T.H. and Morawe، نويسنده , , C. and Ziegler، نويسنده , , E.، نويسنده ,
Abstract :
Applications of the X-ray scattering technique for studying supersmooth surfaces with rms roughness of 0.1–0.2 nm are discussed. The experimental schemes are analyzed and systematic errors on the determination of 2D and 1D PSD-functions are evaluated. Results of laboratory and synchrotron experiments are presented on the study of roughness of superpolished substrates made of different materials as well as for B4C films of different thickness.
