Author/Authors :
V.M. and Dvoryankin، نويسنده , , V.F. and Dikaev، نويسنده , , Yu.M. and Krikunov، نويسنده , , A.I. and Panova، نويسنده , , T.M. and Telegin، نويسنده , , A.A.، نويسنده ,
Abstract :
The multielement X-ray row detector with pitch of 108 μm was made on epitaxial GaAs (p+–n–n′–n+) structures by isotropic etching in solution HCl–KBrO3–H2O. Separation of signals from the near-by detectors is achieved by built-in guard ring on each pixel. The spatial response of the detectors was evaluated.
Keywords :
Guard ring , X-Ray , detector , Chemical etching , RESOLUTION , GaAs
