Title of article
Bandpass filters made by LIGA for the THZ region: Manufacturing and testing
Author/Authors
Nazmov، نويسنده , , V. and Reznikova، نويسنده , , E. and Mathis، نويسنده , , Y.-L. and Mathuni، نويسنده , , J. and Müller، نويسنده , , A. and Rudych، نويسنده , , P. and Last، نويسنده , , A. and Saile، نويسنده , , V.، نويسنده ,
Pages
3
From page
150
To page
152
Abstract
LIGA including deep X-ray lithography has been used to form cross patterns in free-standing foils of different thickness between 20 and 2000 μm. The patterns show bandpass filter behaviors for wavelengths in the 300–800 μm region. Transmittances as high as 99% were achieved, for both, a mercury lamp and the ANKA storage ring in the THz-mode.
Keywords
bandpass filter , Synchrotron , Terahertz radiation , LIGA microstructures
Journal title
Astroparticle Physics
Record number
2026232
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