Title of article :
Fabrication of microstructured optical elements for visible light by means of LIGA-technology
Author/Authors :
Goldenberg، نويسنده , , B.G. and Pindyurin، نويسنده , , V.F. and Ancharova، نويسنده , , U.V. and Eliseev، نويسنده , , V.S. and Petrova، نويسنده , , E.V. and Korolkov، نويسنده , , V.P. and Nasyrov، نويسنده , , R.K. and Nikanorov، نويسنده , , N.Y.، نويسنده ,
Pages :
3
From page :
157
To page :
159
Abstract :
Application of X-ray lithography for fabrication medium-size (units-10 μm) microstructures with 3D-continuous-relief for optical needs is discussed. The method of production LIGA-masks without temporal masks is described. Also processing and preliminary results are presented.
Keywords :
LIGA , X-ray mask , Deep X-Ray lithography
Journal title :
Astroparticle Physics
Record number :
2026234
Link To Document :
https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=2026234
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