High-resolution CMOS sensors for a vertex detector at the Linear Collider

CMOS pixel sensors are a very attractive solution for future vertex detectors needing very high granularity and minimal material budget. The first prototypes, made of small arrays of a few thousands of pixels, demonstrated the viability of the technology and its high tracking performances. The latter could be reproduced with the first reticle sized prototype. An alternative manufacturing technology, without epitaxial layer but based on a lightly doped substrate, was investigated. The contribution summarises the performances observed and provides an outlook on the sensor development.