Fabrication of superconducting transition edge sensor based on Mo and Au bilayers

We report fabricated antenna-coupled superconducting transition edge sensor (TES) for millimeter-wave polarimetry. Superconducting microwave components for an antenna-coupled focal plane will be described in this work. We use low-loss Nb/SiO/Nb transmission line as base materials as a start, although changes in the dielectric may be possible to reduce loss further. Additionally, we have fabricated single- and double-element antennas, filters and detectors. We use TES bilayers consisting of Mo/Au thin films and Nb electrical contacts on a low-stress Si3N4 membrane. In this work, we report transition temperature as a function of Mo thicknesses and Au film composition.