Author/Authors :
Schmidt، نويسنده , , D.R. and Duncan، نويسنده , , W.D. and Irwin، نويسنده , , K.D. and Lehnert، نويسنده , , K.W. and Miller، نويسنده , , N.A and Ullom، نويسنده , , J.N.، نويسنده ,
Abstract :
Normal metal–insulator–superconductor tunnel junctions are candidates for large-format arrays of ultra-low noise equivalent power bolometers. Using a wafer scale process we have fabricated devices with the required sub μ m 3 volumes and ohmic superconductor–normal metal contacts for delivering power loads. Additionally, we demonstrate simultaneous tunnel junction thermometry and SQUID-based Johnson current noise thermometry.
