Author/Authors :
Leoni، نويسنده , , R. C. Mattioli، نويسنده , , F. and Castellano، نويسنده , , M.G. and Cibella، نويسنده , , S. and Carelli، نويسنده , , P. and Pagano، نويسنده , , S. and Perez de Lara، نويسنده , , D. and Ejrnaes، نويسنده , , M. and Lisitskyi، نويسنده , , M.P. and Esposito، نويسنده , , E. and Cristiano، نويسنده , , R. and Nappi، نويسنده , , C.، نويسنده ,
Abstract :
We report here on the state of our fabrication process for Superconducting Single Photon Detectors (SSPDs). We have fabricated submicrometer SSPD structures by electron beam lithography using very thin (10 nm) NbN films deposited by DC-magnetron sputtering on different substrates and at room substrate temperature. The structures show a fast optical response (risetime <500 ps limited by readout electronics) and interesting self-resetting features.
