X-ray microanalysis with microcalorimeters

The combination of high-energy-resolution spectrometers with high-spatial-resolution scanning electron microscopes provides a powerful tool for material analysis. X-ray spectrometers based on superconducting transition edge sensors combine the advantages of commonly used energy- and wavelength-dispersive spectrometers, i.e. a fast spectrum acquisition and a high-energy-resolution over a wide energy range. While the energies of the characteristic lines present in a spectrum contain the qualitative composition of the analyzed material, the corresponding mass fractions can be obtained from their intensities. In this work first quantitative measurements performed with the POLARIS spectrometer system are presented.