Title of article
Silicon micro-pore X-ray optics
Author/Authors
Ezoe، نويسنده , , Y. and Koshiishi، نويسنده , , M. and Mita، نويسنده , , M. and Mitsuda، نويسنده , , K. and Hoshino، نويسنده , , A. and Ishisaki، نويسنده , , Y. and Takano، نويسنده , , T. and Maeda، نويسنده , , R.، نويسنده ,
Pages
4
From page
817
To page
820
Abstract
We present our development of novel light-weight and low-cost micro-pore X-ray optics based on the Micro Electro Mechanical Systems (MEMS) technologies. We successfully fabricated X-ray mirror chips with surface roughness less than several nm and an accurately defined optic mount. Our studies suggest this type of optics is a promising device for X-ray optics in many research fields such as space research, nuclear physics, and microanalysis.
Keywords
Micro-pore optics , Grazing X-ray optics , MEMS
Journal title
Astroparticle Physics
Record number
2029881
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