Title of article
3D integration technologies for imaging applications
Author/Authors
De Moor، نويسنده , , Piet، نويسنده ,
Pages
5
From page
224
To page
228
Abstract
The aim of this paper is to give an overview of micro-electronic technologies under development today, and how they are impacting on the radiation detection and imaging of tomorrow. After a short introduction, the different enabling technologies will be discussed. Finally, a few examples of ongoing developments at IMEC on advanced detector systems will be given.
Keywords
Micro-electronics technology , Detector systems
Journal title
Astroparticle Physics
Record number
2032068
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