Title of article :
3D integration technologies for imaging applications
Author/Authors :
De Moor، نويسنده , , Piet، نويسنده ,
Abstract :
The aim of this paper is to give an overview of micro-electronic technologies under development today, and how they are impacting on the radiation detection and imaging of tomorrow. After a short introduction, the different enabling technologies will be discussed. Finally, a few examples of ongoing developments at IMEC on advanced detector systems will be given.
Keywords :
Micro-electronics technology , Detector systems
Journal title :
Astroparticle Physics
