Title of article :
Calculation of the performance of magnetic lenses with limited machining precision
Author/Authors :
Shanel Sharma، نويسنده , , O. and Zl?mal، نويسنده , , Andrew J. and Oral، نويسنده , , M.، نويسنده ,
Pages :
6
From page :
1
To page :
6
Abstract :
To meet a required STEM resolution, the mechanical precision of the pole pieces of a magnetic lens needs to be determined. A tolerancing plugin in the EOD software is used to determine a configuration which both meets the optical specifications and is cost effective under the constraints of current manufacturing technologies together with a suitable combination of correction elements.
Keywords :
Spot size , Aberrations , Tolerance Analysis , Perturbed geometry , Saturated magnetic lens
Journal title :
Astroparticle Physics
Record number :
2044353
Link To Document :
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