Title of article
Novel field emission SEM column with beam deceleration technology
Author/Authors
Jiru?e، نويسنده , , Jaroslav and Havelka، نويسنده , , Miloslav and Lopour، نويسنده , , Filip، نويسنده ,
Pages
6
From page
27
To page
32
Abstract
A novel field-emission SEM column has been developed that features Beam Deceleration Mode, high-probe current and ultra-fast scanning. New detection system in the column is introduced to detect true secondary electron signal. The resolution power at low energy was doubled for conventional SEM optics and moderately improved for immersion optics. Application examples at low landing energies include change of contrast, imaging of non-conductive samples and thin layers.
Keywords
Low energy electrons , SEM , Beam deceleration , Cathode lens mode
Journal title
Astroparticle Physics
Record number
2044533
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