Author/Authors :
Wei، نويسنده , , Bingqing and Kohler-Redlich، نويسنده , , Philipp and Bنder، نويسنده , , Ute and Heiland، نويسنده , , Birgit and Spolenak، نويسنده , , Ralph and Arzt، نويسنده , , Eduard and Rühle، نويسنده , , Manfred، نويسنده ,
Abstract :
We present here an efficient method to prepare a transmission electron microscopy (TEM) specimen for selective observation of the cross-section of individual nanoscale structures. As a typical example, the cross-sectional TEM observation of a quasi-one-dimensional material – a nano-electronic component based on an individual carbon nanotube – is presented.
Keywords :
Carbon nanotube , high-resolution transmission electron microscopy , specimen preparation , Focused ion beam (FIB) , Cross Section