Concentration limits for the measurement of boron by electron energy-loss spectroscopy and electron-spectroscopic imaging

We have shown that energy-loss spectroscopy in a medium-voltage transmission electron microscope can measure concentrations of boron (in a carbon matrix) down to 0.2 %, with 10% accuracy. The detection limit is determined by electron-beam shot-noise statistics and by gain variations in the photodiode or charge-coupled-diode array.