Author/Authors :
Muramatsu، نويسنده , , H. and Chiba، نويسنده , , N. and Ataka، نويسنده , , T. and Monobe، نويسنده , , H. and Fujihira، نويسنده , , M.، نويسنده ,
Abstract :
Design and performance of a scanning near-field optic/atomic-force microscope (SNOAM) is described in this paper. A sharpened and bent optical fiber was used as a near-field optical probe as well as an atomicforce microscope probe in vertical vibrating mode. The SNOAM provided simultaneous topographical and optical imagings in several optical setting modes. Sub-micron levels of chromium patterns on a glass substrate were clearly observed by the SNOAM.
