Title of article
Visualization of latent images by reflection near field optical microscopy
Author/Authors
O. Bergossi، نويسنده , , O. and Spajer، نويسنده , , M. and Schiavone، نويسنده , , P.، نويسنده ,
Pages
6
From page
241
To page
246
Abstract
Near field reflection imaging on non-developed photoresists is achieved using a dielectric probe. Preliminary results demonstrate a subwavelength resolution uncorrelated with topographic image and a contrast related to the index change integrated on the layer thickness.
Journal title
Astroparticle Physics
Record number
2046352
Link To Document