Optimum condition of convergent beam illumination for observation of local structure by high resolution transmission electron microscopy

We propose the convergent beam illumination as a technique for the local structural analysis by high resolution transmission electron microscopy. The image contrast is lower in the convergent beam illumination than in the parallel beam illumination because of the lower coherency. However the intensity oscillation around an atom image, which appears due to interference effect, is much reduced with the convergent beam illumination, and pseudo-images do not appear at termination of crystal periodicity. The convergent beam illumination, rather than parallel beam illumination, precisely reveals non-periodic local structures, such as interfaces, surfaces and fine particles, which are even embedded in a crystal. From theoretical analysis the optimum condition is derived as divergence of qs∗ = 0.44 and focus of Δz∗ = 1.35 in generalized coordinates. Using the convergent beam illumination the point resolution is improved by 20% compared to conventional parallel beam illumination.