Title of article
New optical probes using InP-based cantilevers
Author/Authors
Castagne، نويسنده , , M and Belier، نويسنده , , B and Gall، نويسنده , , P and Benfedda، نويسنده , , M and Seassal، نويسنده , , C and Spisser، نويسنده , , A and Leclerc، نويسنده , , J.L and Viktorovich، نويسنده , , P، نويسنده ,
Pages
4
From page
81
To page
84
Abstract
Cantilevers made of III–V ternary compounds have been especially designed to obtain a spring constant in the classical range of 0.1 N/m. They are successfully fabricated by epitaxial growth techniques on InP substrate and wet etching. The layer structure is intended to further contribute in a microoptoelectronic device. The cantilever is afterwards provided with a carbon supertip which is expected to play simultaneously both roles of an atomic force sensor and an optical near-field converter.
Keywords
Microfabrication , Integrated photodetector , Near field optics , cantilevers
Journal title
Astroparticle Physics
Record number
2046608
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