Author/Authors :
Castagne، نويسنده , , M and Belier، نويسنده , , B and Gall، نويسنده , , P and Benfedda، نويسنده , , M and Seassal، نويسنده , , C and Spisser، نويسنده , , A and Leclerc، نويسنده , , J.L and Viktorovich، نويسنده , , P، نويسنده ,
Abstract :
Cantilevers made of III–V ternary compounds have been especially designed to obtain a spring constant in the classical range of 0.1 N/m. They are successfully fabricated by epitaxial growth techniques on InP substrate and wet etching. The layer structure is intended to further contribute in a microoptoelectronic device. The cantilever is afterwards provided with a carbon supertip which is expected to play simultaneously both roles of an atomic force sensor and an optical near-field converter.
Keywords :
Microfabrication , Integrated photodetector , Near field optics , cantilevers
