Analysis of the process of anodization with AFM

Nanofabrication is necessary for building a nanodevice, and nanometer scale oxide structures are primary elements for achieving quantum effect. Local oxidation induced by electric field with AFM is a promising method. In this paper, an experimental setup with process monitor is established for analyzing the fabrication technology. Some oxide dots and lines on Si surface were fabricated using the conductive atomic force microscope, while the electric current between the tip and the sample is monitored. The process of anodization is analyzed based on the variational current. The electric charge dependence on the electric current plays an important part in the formation of oxide structures, thus the cross section of oxide dots or lines can be controlled by adjusting the current between the tip and the sample in the process of anodization.