Magnetic field detection for current evaluation by magnetic force microscopy

A current measurement method through magnetic field detection by magnetic force microscopy was proposed and demonstrated. We observed the magnetic field induced by an AC below 2.2 μA around a GaAs/AlGaAs mesa stripe. To achieve high sensitivity in magnetic field detection, we tuned the AC bias frequency to the torsional resonant frequency of the cantilever. As a result, the sensitivity of the magnetic field detection was much improved and specific features of the magnetic field around the mesa stripe were clearly observed at a current in sub-μA range.