Dynamics of space and polarization charges of ferroelectric thin films measured by atomic force microscopy

Retention behavior and local hysteresis characteristics in Pb(Zr0.52Ti0.48)O3 (PZT) thin films on Pt electrodes have been investigated by electrostatic force microscopy (EFM). A sol–gel method is used to synthesize PZT thin films and drying conditions are carefully explored over a wide range of temperature. Decay and retention mechanisms of single-poled and reverse-poled regions of the ferroelectric thin films are explained by space charge redistribution. Trapping behavior of space charges is dependent on the nature of interface between ferroelectric thin films and bottom electrodes. Local measurement of polarization–electric field curves by EFM shows inhomogeneous space charge entrapment.