Title of article
Analysis of nanocrystalline films on rough substrates
Author/Authors
Cimalla، نويسنده , , V. and Machleidt، نويسنده , , T. and Spieك، نويسنده , , L. and Gubisch، نويسنده , , M. and Hotovy، نويسنده , , I. and Romanus، نويسنده , , H. and Ambacher، نويسنده , , O.، نويسنده ,
Pages
6
From page
989
To page
994
Abstract
In this work, we propose a method to estimate basic parameters like the rms roughness and the mean grain size of nanocrystalline thin films on rough substrates. The method is based on the analysis of the power spectral density (PSD) of the surface profile, which allows distinguishing between the two participating components from surface and film. The effectiveness will be demonstrated for thin NiOx layers for gas sensing on Al2O3 ceramic substrates, and for protective WC coatings on steel.
Keywords
Thin films , Nanocrystalline films
Journal title
Astroparticle Physics
Record number
2052034
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