Title of article :
Microhardness of thin molybdenum films
Author/Authors :
Navr?til، نويسنده , , Vladislav and ?ikola، نويسنده , , Tom??، نويسنده ,
Abstract :
The microhardness of thin molybdenum films deposited on monocrystalline Si substrates was measured using a simple method of the extrapolation to a very thick layer. The results obtained give a relatively high value for the film hardness. We attempt to explain this by structural changes which occur in the course of the complicated growth of the films.
Keywords :
Microhardness , Thin films , mechanical properties
Journal title :
Astroparticle Physics
