X-ray study of SrTiO3 thin films in multilayer structures

A set of YBa2Cu3O7-x (YBCO)/SrTiO3 (STO) multilayer structures are investigated using conventional and grazing-incidence X-ray diffraction techniques. For all samples ω- and φ-scans are performed. From the peak position and broadening analysis of peak shape, the a, b, and c lattice parameters for STO films as well as the microstrain values along these directions are evaluated. It is observed that the crystal cell of the STO film becomes orthorhombic when a YBCO thin film is grown on top of STO. The differences between b and a parameters of STO crystal cell and the microstrain are reduced by using buffer layers.